首页> 外国专利> METHOD FOR CHARACTERISING THE POROSITY OF A POROUS MATERIAL BY ANALYSING AN IMAGE OBTAINED BY SCANNING ELECTRON MICROSCOPY

METHOD FOR CHARACTERISING THE POROSITY OF A POROUS MATERIAL BY ANALYSING AN IMAGE OBTAINED BY SCANNING ELECTRON MICROSCOPY

机译:通过扫描电子显微镜观察到的图像来表征多孔材料的孔隙率的方法

摘要

The invention concerns a method for characterising the porosity of a porous material sample by analysing at least one image obtained by scanning electron microscopy, said method comprising the following steps: - preparing a porous material sample having a polished and electrically conductive face, said face having an area of interest; - acquiring, by means of a scanning electron microscope, at least one image of the area of interest of the polished face of the sample; - capturing the image delivered by the scanning electron microscope and processing said image in such a way as to characterise the porosity of the sample; said method being characterised in that the preparation step comprises the following operations: a) providing a sample having a polished face; b) metallising said face, so as to obtain a metallised polished face having higher electrical conductivity than the polished face that has not been metallised; and c) eliminating the metal deposited on the metallised face at the area of interest by localised polishing carried out by means of at least one accelerated ion beam and localised polishing of the area of interest uncovered in this way by means of said at least one accelerated ion beam, in such a way as to obtain an area of interest of which the surface roughness and electrical conductivity are lower than those of the metallised face.
机译:本发明涉及一种通过分析通过扫描电子显微镜获得的至少一个图像来表征多孔材料样品的孔隙率的方法,所述方法包括以下步骤:-制备具有抛光且导电的面的多孔材料样品,所述面具有感兴趣的区域; -通过扫描电子显微镜获取样品抛光面的感兴趣区域的至少一个图像; -捕获由扫描电子显微镜传送的图像,并以表征样品孔隙率的方式处理所述图像;所述方法的特征在于,所述制备步骤包括以下操作:a)提供具有抛光面的样品; b)对所述面进行金属化处理,以获得比未金属化的研磨面具有更高的导电率的金属化的研磨面; c)通过借助于至少一个加速的离子束进行的局部抛光和通过对所述未覆盖的感兴趣的区域的局部抛光,通过所述至少一个加速的离子束消除在感兴趣区域上沉积在金属化表面上的金属。离子束,以便获得其感兴趣的区域,该区域的表面粗糙度和电导率低于金属化表面的表面粗糙度和电导率。

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