METHOD TO MANUFACTURE INTEGRATED DIGITAL X-RAY IMAGE SENSOR, AND INTEGRATED DIGITAL X-RAY IMAGE SENSOR THEREBY

摘要

The present invention provides a method to manufacture an integrated digital X-ray image sensor, and an integrated digital X-ray image sensor thereby. The method includes: a step of forming a plurality of photodiode units in at least one part of a substrate including first and second sides; a step of forming a mold on the first side to be matched with the photodiode units; a step of forming a microstructure, including an uneven part, by etching at least one part of the mold up to a predetermined depth; and a step of forming a scintillator, converting X-ray into a wavelength band able to be sensed by the photodiode units, in the uneven part of the microstructure, or the method includes: a step of forming a plurality of photodiode units in at least one part of a substrate including first and second sides; a step of forming a microstructure, including an uneven part, by etching at least one part of the second side up to a predetermined depth to be matched with the photodiode units; and a step of forming a scintillator, converting X-ray into a wavelength band able to be sensed by the photodiode units, in the uneven part of the microstructure.;COPYRIGHT KIPO 2016