magnetostatically actuated scanning micromirror using magnetic coil integrated in substrate

摘要

A scanning micromirror using sperm motility as a driving force is disclosed. This uses the torque generated between the magnetic field generated when a current flows through the magnetic field coil integrated on the substrate and the permanent magnet coupled to the back of the micromirror as torque. The magnetic field coil integrated on the substrate is realized by using a metal via structure passing through the glass substrate, and a magnetic field is generated when a current is applied. A torque is generated in a direction in which the magnetic field inside the permanent magnet attached to the lower end of the micro mirror and the external magnetic field generated from the external coil are aligned to rotate the micro mirror.