Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

机译：具有集成偏转角传感器的基于体PZT驱动器的扫描微镜

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This paper presents a new type of piezoelectrically actuated scanning micromirror using bulk PZT (lead zirconate titanate) plate and an integrated electromagnetic deflection angle sensor. Proposed actuation mechanism utilizes a commercially available bulk PZT plate attached to a silicon substrate using adhesive. Fabricated device is experimentally characterized and analyzed using finite element analysis. An optical scan angle of 45° at 28.4kHz has been achieved at 50V

机译：本文提出了一种新型的压电驱动扫描微镜，它使用块状PZT（钛酸锆钛酸铅）板和集成的电磁偏转角传感器。提议的致动机构利用使用粘合剂将可商购的块状PZT板附接到硅基板上。使用有限元分析对制造的设备进行实验表征和分析。 50V时，在28.4kHz处实现了45°的光学扫描角

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《International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII》|2019年|1537-1540|共4页
会议地点 Berlin(DE)
作者
Jeong-Yeon Hwang; Chang-Hyeon Ji;
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作者单位

Department of Electronic and Electrical Engineering Ewha Womans University KOREA;

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关键词
Micromirrors; Optical device fabrication; Optical sensors; Force; Electromagnetics; Silicon;

机译：微镜；光学器件制造；光学传感器力;电磁学硅;

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专利

1. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [J] . Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann, Micromachines . 2017,第7期

机译：具有大扫描角度的PZT致动和感应谐振微镜，采用机械杠杆放大技术进行双轴扫描
2. AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors [J] . Lei Hongjie, Wen Quan, Yu Fan, Journal of Micromechanics and Microengineering . 2018,第11期

机译：基于ALN薄膜的压电大孔径MEMS扫描微镜与角度传感器集成
3. Fabrication and Scanning-Angle Temperature Dependence of Metal-Based, Optical Resonant Scanners with PZT Actuation [J] . Jae-Hyuk Park, Akedo J. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 2008,第5期

机译：PZT驱动的基于金属的光学共振扫描仪的制造和扫描角度温度依赖性
4. Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor [C] . Jeong-Yeon Hwang, Chang-Hyeon Ji International Conference on Solid-State Sensors, Actuators and Microsystems . 2019

机译：基于散装PZT致动器的扫描微镜，具有集成偏转角度传感器
5. An electrothermally actuated bi-axial scanning micromirror for medical imaging applications. [D] . Izhar, Umer. 2010

机译：用于医学成像应用的电热致动双轴扫描微镜。
6. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [O] . Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, 2017

机译：具有大扫描角度的PZT致动和感应谐振微镜采用机械杠杆放大技术进行双轴扫描
7. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [O] . Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, 2017

机译：具有大扫描角的pZT驱动和激活谐振微镜应用机械杠杆放大进行双轴扫描
8. Design of CNT Embedded Adhesive Film for Sensing, Control, and Reinforcement of PZT Actuator/Sensor Networks in Multifunctional Composites During Cure. [R] . Lanzara, G., Zhang, L., Chang, F. 2010

机译：用于多功能复合材料中pZT执行器/传感器网络传感，控制和加固的CNT嵌入式粘合膜的设计。

Bulk PZT Actuator Based Scanning Micromirror with Integrated Deflection Angle Sensor

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