METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE OF SILICA GLASS CRUCIBLE AND METHOD FOR PRODUCING MONOCRYSTALLINE SILICON

摘要

A three-dimensional shape measuring method of a silica glass crucible capable of measuring a three-dimensional shape of an inner surface of a crucible without contaminating the inner surface of the crucible. According to the present invention, there is provided a silica glass crucible comprising a step of causing turbidity on the inner surface of a silica glass crucible, a step of irradiating light to the inner surface, and a step of measuring the three-Dimensional shape measuring method of the present invention.;