Three-dimensional Deposition of Silicon Structure from Silicate Glass with Dispersed Metallie Muminum by Femtosecond Laser Irradiation

摘要

We fabricated a silicon structure in silicate glass prepared with metallic aluminum in the starting material,using femtosecond laser irradiation.Small Si-rich structures such as Si clusters were transformed into larger,but still nano-sized,Si particles by laser irradiation.These structures grew to micro- size particles due to the thermite reaction promoted by heat treatment.We determined the effect of focused laser pulses on the Si deposition process using the time-resolved transient lens method.Localized high-temperature, high-pressure,and the generation of shock waves appear to be very important in forming the Si-rich structures that ultimately grow into Si particles.