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Fabrication of Microstructure Arrays on Photosensitive Glass by Femtosecond Laser

机译:Fabrication of microstructure arrays on photosensitive Glass by Femtosecond Laser

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摘要

A maskless technique for the fabrication of U-shaped microstructure arrays on the surface of photosensitive glass by femtosecond laser-induced modification is developed. This technique is followed by heat treatment to crystallize the modified area, and the specimen is then placed in acid solution for chemical etching. The surface roughness of the microstructures is further improved by a secondary annealing process. The fabricated photosensitive glass is used as a mold template, and replicated plano-convex cylindrical arrays by UV-replica are also presented. The focusing ability of the microlens arrays on the glass mold and replicate is demonstrated. DOI: 10.2961/jlmn.2012.01.0024
机译:开发了一种通过飞秒激光诱导改性在光敏玻璃表面制备U形微结构阵列的无掩模技术。此技术之后进行热处理以使修改后的区域结晶,然后将样本置于酸性溶液中进行化学蚀刻。通过二次退火工艺进一步改善了微结构的表面粗糙度。将制成的光敏玻璃用作模具模板,并介绍了通过UV复制技术复制的平凸圆柱阵列。证明了微透镜阵列在玻璃模具和复制品上的聚焦能力。 DOI:10.2961 / jlmn.2012.01.0024

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