SIGNAL PROCESSING OF MULTI-LAYER SURFACE SHAPE ACQUISITION USING WHITE LIGHT INTERFEROMETER

摘要

According to one embodiment, a signal processing of multi-layer surface shape acquisition using a white light interferometer uses a basic tunable laser or a white light as a light source; concentrates and irradiates the light source to a sample stage and a reference stage by equipping an illumination optical system on a front end of a beam splitter of an interferometer; obtains an interference signal for each wavelength by forming an image without distortion such as spherical aberration and chromatic aberration using an imaging lens for a light receiving optical system; and acquires surface shape information of several layers simultaneously by separating a component corresponding to each layer after extracting frequency information and phase information by Fourier transforming the obtained interference signal.;COPYRIGHT KIPO 2017