- Calibration of a direct-imaging system

摘要

The optical device includes a mount for holding the workpiece. An array of optical heads projects radiation having respective patterns into the workpiece. A calibration device captures an image of each pattern. A motion assembly with a calibration device carries an alignment device between a plurality of different positions between an array of optical heads and a mount to intercept each pattern projected by the optical head angles at the different position angles . The processor processes the images captured by the calibrating device at different locations to monitor the operation of the device.