MICROBOLOMETER ARRAY SENSOR CAPABLE OF CANCELING SELF HEATING AND INFRARED DETECTOR INCLUDING THE SAME

摘要

According to the present invention, a microbolometer array sensor comprises a unit warm cell. The unit warm cell comprises: a body unit including a thermistor; two legs extended from edges of the body unit; two anchors extended from ends of the legs; and a heat transfer path to discharge heat by self-heating or a remote infrared signal to the anchors of the warm cell or the anchors of an adjacent warm cell. The warm cell has a structure of the body unit identical to a detection cell, the legs, and the anchors. Accordingly, fixed pattern noise is greatly reduced to remove or reduce additional equipment such as hardware/software elements, a thermoelectric cooler, and a shutter. Also, since a warm cell array capable cancelling self-heating is used in a skimming circuit, reactivity and a dynamic range of an infrared detector can be greatly improved.