GRAPHENE FLUORINATION FOR INTEGRATION OF GRAPHENE WITH INSULATORS AND DEVICES

摘要

Embodiments of the present disclosure describe multilayer graphene assemblies including layers of fluorinated graphene, dies and systems that include such structures, as well as manufacturing methods. The fluorinated graphene provides an insulating interface to the other graphene layers while maintaining the desired properties of the non-fluorinated graphene layers. The assemblies use graphene in integrated circuit devices and provide new options for interfacing graphene with other materials. Other embodiments may be described and / or claimed.