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GRAPHENE FLUORINATION FOR INTEGRATION OF GRAPHENE WITH INSULATORS AND DEVICES
GRAPHENE FLUORINATION FOR INTEGRATION OF GRAPHENE WITH INSULATORS AND DEVICES
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机译:石墨烯氟化法将石墨烯与绝缘体和设备结合在一起
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摘要
Embodiments of the present disclosure describe multi-layer graphene assemblies including a layer of fluorinated graphene, dies and systems containing such structures, as well as methods of fabrication. The fluorinated graphene provides an insulating interface to other graphene layers while maintaining the desirable characteristics of the nonfluorinated graphene layers. The assemblies provide new options for utilizing graphene in integrated circuit devices and interfacing graphene with other materials. Other embodiments may be described and/or claimed.
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