THIN FILM TRANSISTOR ARRAY SUBSTRATE DISPLAY DEVICE INCLUDING THE THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD OF THE THIN FILM TRANSISTOR ARRAY SUBSTRATE

摘要

According to an embodiment of the present invention, a thin film transistor array substrate comprises: a first active layer which is arranged on a substrate, and includes a source region and a drain region separated from each other, and a channel region between the source region and the drain region; a second active layer which is arranged on the channel region of the first active layer, and has higher mobility than the first active layer; a gate insulation layer arranged on the second active layer; a gate electrode arranged on the gate insulation layer; an interlayer insulation film to cover the first and the second active layer, the gate insulation layer, and the gate electrode; a source electrode arranged on the interlayer insulation film and connected to the source region of the first active layer; and a drain electrode arranged on the interlayer insulation film and connected to the drain region of the first active layer. Accordingly, the second active layer having the higher mobility than the first active layer is included to improve a response speed in comparison to a case where only the first active layer is included. And since the source electrode and the drain electrode are connected to the first active layer of a thickness thicker than the second active layer to lower offset resistance, an increase in consumed power can be prevented.