FABRICATION TECHNOLOGY OF HIGH TRANSPARENCY DLC FILM HAVING EXCELLENT HARDNESS AND WEAR RESISTANCE

摘要

The present invention relates to a fabrication technology of a high transparency diamond like carbon (DLC) film having excellent hardness and wear resistance. According to the present invention, even if a film is deposited in the thickness capable of maintaining excellent wear resistance, a film of the thickness of 1 or more without degradation of a penetration ratio is formed, so a high transparency DLC thin film having excellent wear resistance, hardness and transparency can be manufactured. To this end, provided is a glass substrate in which a transparent DLC film containing SiO is formed on the glass substrate.;COPYRIGHT KIPO 2017