TFT MIS METHOD AND SYSTEM FOR CONTROLLING MIS STRUCTURE DESIGN IN TFT

摘要

The control method of the MIS structure in the TFT design and system obtain by calculating the dielectric constant of the silicon nitride in the design MIS structure; But determines if the dielectric constant of silicon nitride, up to the set value of the TFT manufacturing process, wherein the determining if the result is not a set value, by adjusting a parameter of the MIS structure, the dielectric constant of the silicon nitride in the control MIS structure TFT manufacturing process and a step of so as to reach the value of the set. The method and system can effectively control the MIS structure design, improve the TFT-LCD product performance and stability.;