TFT MIS METHOD AND SYSTEM FOR CONTROLLING MIS STRUCTURE DESIGN IN TFT

摘要

A method and system for controlling the MIS structure design in a TFT comprises the steps of: obtaining a dielectric constant of silicon nitride in a designed MIS structure; Wherein the dielectric constant of the silicon nitride in the adjusted MIS structure is adjusted by adjusting parameters of the MIS structure when the determination result is not the set value, So as to reach a set value of a predetermined value. The method and system can effectively control the MIS structure design and improve the performance and stability of the TFT-LCD product.