Multi-Zone Active-Matrix Temperature Control System and Temperature Control Method and Electrostatic Chuck and Plasma Processing Apparatus apply thereof

摘要

The present invention is the liquid matrix temperature control system of property more than one, the temperature control system includes temperature control matrix and favourable turn driver, and above-mentioned temperature control operation system will become N * M temperature control modules, the power supply line supply line, power supply involution line of " the hot imperialism matrixes of N rows M "; Each temperature control modules include included below; Temperature control unit appropriate is heated for temperature controlled electric power, the jag electrode and preceding power supply power supply and upper temperature in the connection of forward's driver control unit, the automated semiconductor switch that upper line involution line comes to the connection of the both ends of a connecting line; Temperature control system will connect power supply and return to power supply with a line or the temperature of same a line temperature control modules control group while terminating and connecting for one of all lines of return. With line by line or the semiconductor switch of same hot temperature control modules, one end and series connection in power supply line supply line, while connecting power supply line. The amount of proposing of truce ship can be greatly decreased to the correct temperature schedule of the angle of truce in the present invention.