Multi-Zone Active-Matrix Temperature Control System and Temperature Control Method and Electrostatic Chuck and Plasma Processing Apparatus apply thereof

摘要

The present invention is a multi-zone active matrix temperature control system, wherein the temperature control system includes a temperature control matrix and a gate driver, the temperature control matrix comprising: N * M temperature control modules formed by a matrix of N rows and M columns, a power supply line, a power return line; Each temperature control module includes the following; A gate electrode connected to the gate driver; a semiconductor switch connected between both ends of the gate to the power supply return line through the power supply line and the temperature control unit and turned on and off; In the temperature control matrix, the temperature control unit of the temperature control module in the same row or same column is connected in series with one end of the power return line and at the same time with the power return line. The semiconductor switch of the temperature control module of the same row or the same column is connected in series with the power supply line at one end of the power supply line. The present invention can accurately control the temperature of each zone of the electrostatic chuck, thereby greatly reducing the number of lines drawn out of the electrostatic chuck.