JIG FOR COMPENSATION PROCESSING OFF-AXIS REFLECTIVE MIRROR AND COMPENSATION PROCESSING METHOD USING SAME

摘要

The present invention relates to a jig for compensation processing an off-axis reflective mirror, and a compensation processing method using the same. More specifically, the present invention relates to the compensation processing method using the jig, and the jig for compensation processing an off-axis reflective mirror minimizing an alignment error in a processing process of an off-axis reflective mirror and a shape measurement process of the off-axis reflective mirror in order to improve reproducibility of processing and measurement.;COPYRIGHT KIPO 2017