UNIQUE OBLIQUE LIGHTING TECHNIQUE USING A BRIGHTFIELD DARKFIELD OBJECTIVE AND IMAGING METHOD RELATING THERETO

摘要

A process for imaging the surface of a specimen is provided with an imaging system employing a BD objective with a dark field channel and a bright field channel and the BD objective has a perimeter. The specimen passes through the first arc of the perimeter and is obliquely irradiated through the dark night channel with the first arc type irradiation light that obliquely irradiates the specimen. The first arc type irradiation light reflected from the surface of the specimen is recorded as a first image of the specimen from the first arc type irradiation light reflected from the surface of the specimen and the processor processes the first image through the topographic imaging technique, Create 3D terrain. An imaging device for further processing the steps for other embodiments is also provided.