4 - GROUP 4 METAL ELEMENT-CONTAINING COMPOUND PREPARING METHOD THEREOF PRECURSOR COMPOSITION INCLUDING THE SAME FOR LAYER DEPOSITION AND DEPOSITING METHOD OF LAYER USING THE SAME

摘要

The present invention relates to a novel group 4 metal element-containing compound, to a production method of the group 4 metal element-containing compound, to a precursor composition for film deposition, comprising the group 4 metal element-containing compound, and to a deposition method of the group 4 metal element-containing film using the precursor composition.