首页> 外国专利> APPARATUS FOR PREPARING AQUEOUS RESIST STRIPPING LIQUID AND APPARATUS FOR PREPARING NON-AQUEOUS RESIST STRIPPING LIQUID

APPARATUS FOR PREPARING AQUEOUS RESIST STRIPPING LIQUID AND APPARATUS FOR PREPARING NON-AQUEOUS RESIST STRIPPING LIQUID

机译:制备水溶汽提液的装置和制备非水溶汽提液的装置

摘要

An objective of the present invention is to provide an aqueous resist stripper preparing apparatus and a non-aqueous resist stripper preparing apparatus which can prepare a resist stripper with predetermined component concentrations from raw materials of the resist stripper accurately, automatically, and continuously. To achieve the objective, the aqueous resist stripper preparing apparatus (10) comprises a preparation tank (3), a measuring unit (2), and a control unit (1). The preparation tank (3) receives and mixes the raw materials of the resist stripper. The measuring unit (2) measures at least one of physical property values of the resist stripper having a correlation with the component concentrations of the resist stripper and component concentrations of the resist stripper with respect to the resist stripper within the preparation tank (3). The control unit (1) controls a supply amount of the raw materials of the resist stripper supplied to the preparation tank (3) such that the resist stripper prepared within the preparation tank (3) has predetermined component concentrations based on measurement values measured by the measuring unit (2). The aqueous resist stripper preparing apparatus prepares a resist stripper with desired component concentrations accurately by performing the above processes automatically and continuously.
机译:本发明的目的是提供一种水性抗蚀剂剥离剂制备装置和非水抗蚀剂剥离剂制备装置,其可以从抗蚀剂剥离剂的原料中准确,自动,连续地制备具有预定成分浓度的抗蚀剂剥离剂。为了实现该目的,水性抗蚀剂剥离剂制备设备(10)包括制备槽(3),测量单元(2)和控制单元(1)。准备槽(3)接收并混合抗蚀剂剥离剂的原料。测量单元(2)测量抗蚀剂剥离剂的物理性质值中的至少一个,其与抗蚀剂剥离剂的成分浓度和相对于制备槽(3)内的抗蚀剂剥离剂的抗蚀剂剥离剂的成分浓度具有相关性。控制单元(1)基于由所述测量装置测量的测量值,控制供应到所述制备槽(3)的所述抗蚀剂剥离剂的原料的供应量,以使得在所述制备槽(3)内制备的所述抗蚀剂剥离剂具有预定的成分浓度。测量单元(2)。水性抗蚀剂剥离剂制备设备通过自动且连续地进行上述过程来精确地制备具有期望组分浓度的抗蚀剂剥离剂。

著录项

  • 公开/公告号KR20170106909A

    专利类型

  • 公开/公告日2017-09-22

    原文格式PDF

  • 申请/专利权人 HIRAMA LABORATORIES CO. LTD.;

    申请/专利号KR20170022651

  • 发明设计人 NAKAGAWA TOSHIMOTO;

    申请日2017-02-21

  • 分类号G03F7/42;G03F7/09;G03F7/20;G03F7/34;

  • 国家 KR

  • 入库时间 2022-08-21 13:26:37

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