THROTTLE UNIT AND A STATIC PRESSURE BEARING DEVICE EQUIPPED WITH THE THROTTLE UNIT AND A METHOD OF MANUFACTURING A GROOVED BLOCK

摘要

A throttle unit, a hydrostatic bearing device having the throttle unit, and a method of manufacturing a groove-formed block. The throttle unit 14A includes a block 24 in which a groove having at least one fine groove 25 is formed on a plane 15 and a counter block 26 having a plane 27 opposed to the fine groove 25 ). The grooved block 24 and the opposing block 26 are detachably coupled to each other so that the throttle channel 18 is formed by the plane 27 of the fine groove 25 and the opposing block 26 do. At least one surface of the fine grooves 25 is formed of an inclined surface or a curved surface inclined with respect to the plane 15 of the grooved block 24.