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THROTTLE UNIT AND A STATIC PRESSURE BEARING DEVICE EQUIPPED WITH THE THROTTLE UNIT, AND A METHOD OF MANUFACTURING A GROOVED BLOCK
THROTTLE UNIT AND A STATIC PRESSURE BEARING DEVICE EQUIPPED WITH THE THROTTLE UNIT, AND A METHOD OF MANUFACTURING A GROOVED BLOCK
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机译:节流阀单元和配备有节流阀单元的静压装置以及制造带槽块的方法
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摘要
A throttle unit is equipped with a grooved block including at least one minute groove formed on a plane surface, and an opposite block having a plane surface which is opposite to the minute groove. The grooved block and the opposite block are detachably joined so as to be opposite to each other. A throttle fluid path is formed by the minute groove and the plane surface of the opposite block. At least one surface of each of the minute groove is constituted by a curved surface or an inclined surface that is inclined with respect to the plane surface of the grooved block.
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