manufacturing method of metal-oxide nano particle patterned and metal-oxide nano particle patterned thereby

摘要

The present invention relates to a metal oxide nanoparticle structure, comprising: a first step of coating a metal resist on a substrate to form a metal resist layer; patterning the metal resist layer to expose a part of the substrate; A second step of forming a metal resist pattern having a constant period (c), a width (a), and a height (b), and a step of applying energy to the metal resist pattern to decompose organic substances contained in the metal resist, Forming a patterned metal oxide nanoparticle structure having a period (e), (f), and a size (d) corresponding to a period (c), a width And a patterned metal oxide nanoparticle structure produced by the method. The present invention also provides a method for producing a patterned metal oxide nanoparticle structure, comprising the steps of: According to the present invention, a metal resist is coated on a substrate to form a pattern, energy is applied to the patterned metal oxide nano-particles having a predetermined period and size in accordance with decomposition of organic materials contained in the metal resist, It is easy to control the position, size, and arrangement period of the nanoparticles by a simple method, thereby making it easy to produce a fine pattern.