METHOD FOR PREPARING SILICON NANOPOWDER AND RF HEAT PLASMA APPARATUS FOR PREPARING SILICON NANOPOWDER

摘要

The present invention relates to a method for preparing silicon nanopowder with a selected particle size under the optimized conditions of location and flow of cooling gas injection, and a RF heat plasma apparatus for preparing silicon nanopowder. The method for preparing silicon nanopowder comprises the steps of: 1) supplying a RF heat plasma-generating gas to a RF heat plasma apparatus to generate RF heat plasma; 2) injecting a cooling gas through a cooling device in the direction opposite to the direction of injecting the RF heat plasma-generating gas in step 1); and 3) supplying silicon powder to the RF heat plasma generated in step 1) to carry out vaporization and cooling. In addition, the RF heat plasma apparatus for preparing silicon nanopowder comprises: a torch for generating heat plasma; a reactor extended in the direction of flow of the heat plasma generated from the torch; a feed supplying device for injecting silicon powder to the heat plasma; and a cooling device for injecting a cooling gas in the direction opposite to the direction of injecting the plasma-generating gas.;COPYRIGHT KIPO 2017