CVD Method for Synthesizing Transition Metal Chalcogenide Using CVD

摘要

A method of synthesizing a transition metal chalcogen compound using CVD is disclosed. The disclosed method comprises: (a) preparing a vacuum chamber loaded with an alkali metal sa And (b) injecting a precursor having a halide ligand and a reactant into the vacuum chamber to synthesize a transition metal chalcogenide compound by CVD. According to the disclosed method, it is possible to synthesize a transition metal chalcogenide compound by CVD at a high speed, and the carbon component can be efficiently removed when a substance having an organic ligand roll as a reaction material is used.;