HIGH TEMPERATURE OXIDATION RESISTANT BORON CARBIDE THIN FILM CUTTING TOOLS USING THE THIN FILM AND METHOD OF MANUFACTURING THE SAME

摘要

The carbide boron carbide thin film excellent in oxidation resistance at high temperature has a structure in which a boron carbide layer and a silicon carbide layer are alternately and repeatedly laminated. As a result, the boron carbide thin film has improved oxidation resistance at high temperatures and can be used as a coating material for wear resistant tools such as cutting tools.