METALLIZATION HAVING HIGH POWER COMPATIBILITY AND HIGH ELECTRICAL CONDUCTIVITY

摘要

Metal wiring is provided especially for devices operating with acoustic waves, and metal wiring has high performance stability and high electrical conductivity. To this end, the metallization comprises a bottom with a bottom layer (BL) containing titanium and a top layer (UL) containing copper. The upper layer TL of the metal wiring disposed on the bottom contains aluminum.;