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CREATION METHOD OF DRAWING DATA ENERGY BEAM DRAWING METHOD AND ENERGY BEAM DRAWING APPARATUS
CREATION METHOD OF DRAWING DATA ENERGY BEAM DRAWING METHOD AND ENERGY BEAM DRAWING APPARATUS
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机译:绘制数据的方法能量束绘制方法和能量束绘制装置
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摘要
A drawing data creation method according to the present embodiment is a drawing data creation method for performing a drawing process of a drawing pattern drawn by an energy beam, the drawing data including vertexes of the drawing patterns connected by a plurality of vectors, , A pair of vectors located on the same straight line and opposite in direction and extracting a pair of vectors from the pair of near end points each including a pair of near end points of the extracted pair of vectors, And the figure data indicating the shape, size, and position of the figure, the presence / absence of the resize, the resize direction and the size Rendering data defining the size information representing the amount of resizing for each direction is created.
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