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CREATION METHOD OF DRAWING DATA ENERGY BEAM DRAWING METHOD AND ENERGY BEAM DRAWING APPARATUS

机译:绘制数据的方法能量束绘制方法和能量束绘制装置

摘要

A drawing data creation method according to the present embodiment is a drawing data creation method for performing a drawing process of a drawing pattern drawn by an energy beam, the drawing data including vertexes of the drawing patterns connected by a plurality of vectors, , A pair of vectors located on the same straight line and opposite in direction and extracting a pair of vectors from the pair of near end points each including a pair of near end points of the extracted pair of vectors, And the figure data indicating the shape, size, and position of the figure, the presence / absence of the resize, the resize direction and the size Rendering data defining the size information representing the amount of resizing for each direction is created.
机译:根据本实施例的绘制数据创建方法是用于执行由能量束绘制的绘制图案的绘制处理的绘制数据创建方法,该绘制数据包括通过多个矢量,位于同一直线上且方向相反的向量,并从一对近端点中提取一对向量,每个近端点中包括所提取的一对向量的一对近端,以及表示形状,大小的图形数据,图的位置,位置,是否存在尺寸调整,尺寸调整方向和尺寸。创建定义尺寸信息的绘制数据,该尺寸信息表示每个方向的尺寸调整量。

著录项

  • 公开/公告号KR101770387B1

    专利类型

  • 公开/公告日2017-08-22

    原文格式PDF

  • 申请/专利号KR20160005928

  • 发明设计人 야시마 준;

    申请日2016-01-18

  • 分类号H01L21/027;G03F7;G03F7/20;

  • 国家 KR

  • 入库时间 2022-08-21 13:24:56

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