Manufacturing plant for the production of integrated circuits from semiconductor wafers and waffle element for a manufacturing plant

摘要

The manufacturing plant is used to fabricate integrated circuits on semiconductor wafers and has at least one radiation generator that generates EUV radiation. It is fed to at least one lithography machine for exposing the wafers. The lithography machine is housed in a factory building. The radiation generator is located in a separate building or building section from the factory building. The EUV radiation is supplied to the factory building via at least one beam guide. From the beam guide branches off at an obtuse angle at least one supply line, is supplied via the at least part of the EUV radiation of the lithographic machine. The waffle element has at least one passage which has a rectangular outline and encloses an acute angle with a median plane of the waffle element, viewed in plan view of the waffle element. The production facility and the waffle element enable a cost-effective and simple design of the supply of EUV radiation to the lithographic machine.