A method for detecting a dynamic oscillations of a roughness sensor, a process for the measurement of the roughness of a workpiece surface, a computer program product as well as measuring device to carry out the method.

摘要

The present invention relates to a method according to the invention, 20 for detecting the dynamic vibrations of a roughness sensor 12 of a roughness measuring device 28, wherein in a first method step 21 the relative movement of the roughness sensor 12 with respect to the instrument known 28 and / or with respect to a surface to be measured 16 of a workpiece by at least one additional measuring system 33 in the frequency range below 100 hz with a data acquisition rate of greater than 100 hz is sensed and wherein in a second process step 22 the detected data of the relative movement for a further data processing and / or stored in a third process step 23 are stored. In addition, the invention relates to a method of 30 to the measurement of the roughness of a workpiece surface 16 in which the process according to the invention is 20 for detecting the dynamic vibrations of a roughness sensor is inserted, a computer program product for controlling a roughness sensor of a roughness measuring device according to any one of the method as well as an instrument known set up for execution of one of the method.