Imaging optical system for imaging an object field in an image field with euv - abstract light

摘要

An imaging optical system has a plurality of mirrors for imaging an object field in an object plane in an image field in an image plane with euv - abstract light (3). This imaging takes place along a imaging beam path, which specifies a light tube (24), within which the abstract light (3) is guided. A light pipes - detection device (21) is used to determine the position of the light tube (24). The light pipes - detection device (21) has at least three euv - sensors (25), which in the circumferential direction by a main beam (16_z) a central field point distributed in a region of the wheel (28) of the light tube (24) are arranged. The result is an imaging optical system is, in which an undesirable image loss or an unwanted telecentric error is avoided.