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Substrate pre - structure for the embodiment of the photonic components, a photonic circuit and method of manufacture associated
Substrate pre - structure for the embodiment of the photonic components, a photonic circuit and method of manufacture associated
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机译:用于光子部件的实施例的衬底预结构,光子电路及其制造方法
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摘要
A substrate locally pre-structured for the production of photonic components including a solid part made of silicon; a first localised region of the substrate, including a heat dissipation layer, produced in a localised manner on the surface of the solid part and made of a material of which the refractive index is less than that of silicon; a wave guide on the heat dissipation layer; a second localised region of the substrate, including an oxide layer produced in a localised manner on the surface of the solid part, the oxide having a heat conductivity less than that of the material of the heat dissipation layer; a wave guide on the oxide layer.
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