Method of calculation, 1984, of the diffraction of a structure

摘要

The invention relates to a method for numerical calculation of the diffraction of a structure (1), wherein a numerical model defines the dielectric permittivity at each point, comprising the steps of: - defining a numerical modelling of a diffraction model of a structure, including: - splitting the numerical model of dielectric permittivity into N numerical models of dielectric permittivity; - determining the diffraction model of said layers starting from the numerical model of said layer; - numerically calculating the diffraction of the structure, including: - an initial iteration during which: - a wave propagation is performed in the direction of layers 1 to N, - and a wave propagation is performed in the direction of layers N to 1, - subsequent iterations are performed, each subsequent iteration of index k including: - a wave propagation in the direction of layers 2 to N: - a wave propagation in the direction of layers N-1 to 1.