CALCULATION METHOD FOR STRUCTURE DATA OF DIFFRACTION OPTICAL ELEMENT, PROGRAM, AND MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a calculation method for structure data of a diffraction optical element, a program, and a manufacturing method, capable of reproducing a light intensity distribution point-symmetry with respect to an optical axis with an iterated Fourier transformation method effectively in a noise reduced state.SOLUTION: A calculation method for calculating data for a structure of a two-stage diffraction optical element 10 forming a pair of light intensity distributions point-symmetry with respect to an optical axis in an image surface, includes: a step S120 of calculating, with an iterated Fourier transformation method using a computer, a light intensity distribution and a phase distribution on a surface of the two-stage diffraction optical element, which has a relationship of a Fourier transformation with the image surface, by applying a reverse-Fourier transformation to a light intensity distribution from which one of the pair of light intensity distributions is removed; and a step of calculating data having a structure of the diffraction optical element which forms the light intensity distribution and the phase distribution thus calculated.