METHOD AND DEVICE FOR VISUALIZING DISTRIBUTION OF LOCAL ELECTRIC FIELD

摘要

Provided is a device for visualizing distribution of a local electric field formed near a sample (2) wherein distribution of a local electric field is visualized in multi-tone by deflecting a primary electron beam (1) passing through a local electric field formed near a sample (2) by the local electric field, detecting secondary electrons generated and discharged from a detection element provided on the downstream side of the orbit of the deflected primary electron beam (1) by means of a secondary electron detector (6), and then synthesizing an image formed of detected signals and a scanning electron beam image obtained by scanning the sample (2). Consequently, a method for visualizing distribution of a local electric field, in which distribution of a local electric field can be obtained in real time and in multi-tone by single image scanning using an ordinary electron beam scanning optical system, can be provided.