MICRO-ELECTRICAL DISCHARGED BASED METROLOGY SYSTEMS AND CORRESPONDING OPERATING METHOD

摘要

A micro-electrical discharge machine based metrology system including a control unit with a sensing circuit and a micro-electrical discharge machine with a sensing probe. The micro-electrical discharge machine based metrology system capable of sensing dimensions of a work piece at pico-joule energy levels. The micro-electrical discharge machine based metrology system is a non-contact, non-destructive, and on-board metrology system capable of in-process quality assurance/quality control.