Metrology systems based on micro-electrical discharge method and corresponding operation

摘要

A metrology system for non-contact (10) comprising: a control unit (12) including a detection circuit (24), a controller (26) and a control cable (28); a probe screw (14) in electrical connection with the detection circuit (24); machine micro-electrical discharges (16) connected to the control unit (12) with the control cable (28), the machine including micro-electrical discharges (16) a receiver (30) for holding the probe spindle (14); a mechanism (34) in communication with the control unit (12) to move the probe spindle (14) in at least two dimensions; a tank (18) including a working surface (20); a workpiece (100) positioned on the work surface (20); wherein the mechanism (34) receives instructions from the controller (26) to move the probe spindle (14) in the vicinity of the workpiece (100), when a space between the workpiece (100) and probe screw (14) is small enough dielectric breakdown takes place and the detection circuit (24) detects a current flow due to dielectric breakdown and a position of the probe spindle (14) is recorded; and wherein the detection circuit (24) with a voltage detection between 5 and 20 V so that a resulting energy of the dielectric breakdown is less than 2.0 nanojoules and not damage to a surface of the workpiece (100).