VIBRATION-APPLYING DEVICE, ELECTRODYNAMIC ACTUATOR, CROSSED GUIDEWAY, LINEAR GUIDEWAY, AND VIBRATING TABLE

摘要

An oscillating device according to an embodiment of the present invention comprises: a vibrating table; an X-axis oscillating unit configured to oscillate the vibrating table in an X-axis direction; a Y-axis oscillating unit configured to oscillate the vibrating table in a Y-axis direction; a Z-axis oscillating unit configured to oscillate the vibrating table in a Z-axis direction; a first linear guideway configured to couple the vibrating table and the Z-axis oscillating unit slidably in the X-axis direction; and a second linear guideway configured to couple the vibrating table and the Z-axis oscillating unit slidably in the Y-axis direction, wherein the X-axis linear guideway comprises: an X-axis rail extending in the X-axis direction; and an X-axis carriage configured to engage with the X-axis rail slidably in the X-axis direction, wherein the Y-axis linear guideway comprises: a Y-axis rail extending in the Y-axis direction; and a Y-axis carriage configured to engage with the Y-axis rail slidably in the Y-axis direction, wherein the X-axis carriage is directly fixed to the Y-axis carriage.