首页> 外国专利> DISPLACEMENT DETECTION APPARATUS, DISPLACEMENT GAUGING APPARATUS AND FIXED POINT DETECTION APPARATUS

DISPLACEMENT DETECTION APPARATUS, DISPLACEMENT GAUGING APPARATUS AND FIXED POINT DETECTION APPARATUS

机译:位移检测装置,位移量测装置和定点检测装置

摘要

A displacement detecting apparatus, a displacement gauging apparatus and a fixed point detection apparatus can highly accurately detect a fixed point or gauge a displacement by reducing the disturbances of polarization due to the stress and the buckling of the optical fiber for transmitting a light beam emitted from a light source to the detecting side. The displacement detection apparatus includes a light source for emitting a light beam, an extinction ratio converting unit that raises the extinction ratio of the light beam emitted from the light source to not less than 20 dB, a focusing lens for focusing the light beam of an extinction ratio raised to not less than 20 dB by the extinction ratio converting unit, an optical fiber of the polarization holding type for transmitting the light beam focused by the focusing lens, a diffraction grating fitted to an object of measurement so as to be irradiated with and diffract the light beam transmitted through the optical fiber, and a light receiving unit that receives the light beam diffracted by the diffraction grating, the light beam focused by the focusing lens with the extinction ratio raised to not less than 20 dB by the extinction ratio converting unit being made to enter the optical fiber with its axis of polarization made to agree with the optical axis of the optical fiber or an axis orthogonally intersecting the optical axis, the light receiving unit being adapted to detect the displacement of the object of measurement by means of the level of the rate of receiving the diffracted light beam.
机译:位移检测设备,位移测量设备和定点检测设备可以通过减少由于应力和由用于传输从中发射的光束的光纤弯曲而引起的偏振干扰来高精度地检测定点或测量位移。到检测侧的光源。所述位移检测装置包括:用于发射光束的光源;将所述光源发射的光束的消光比提高到不小于20dB的消光比转换单元;用于将所述光束的光束聚焦的聚焦透镜。通过消光比转换单元将消光比提高到不小于20dB,偏振保持型的光纤用于透射由聚焦透镜聚焦的光束,衍射光栅安装在测量对象上以被辐照。然后,使通过光纤的光束衍射,并接收由衍射光栅衍射的光束的受光部,通过聚焦透镜聚焦后的光束的消光比被消光比提高到20dB以上。使转换单元以其偏振轴与光纤或轴的光轴一致的方式进入光纤在与光轴正交的方向上,光接收单元适于通过接收衍射光束的速率的水平来检测测量对象的位移。

著录项

  • 公开/公告号EP3029428B1

    专利类型

  • 公开/公告日2018-01-31

    原文格式PDF

  • 申请/专利权人 MORI SEIKI CO. LTD.;

    申请/专利号EP20160151727

  • 发明设计人 TAMIYA HIDEAKI;

    申请日2005-12-12

  • 分类号G01D5/38;

  • 国家 EP

  • 入库时间 2022-08-21 13:17:35

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号