X-RAY ANALYSIS DEVICE, AND FERROELECTRIC SUBSTANCE POLARIZATION CHARACTERISTIC EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a ferroelectric substance polarization characteristic thanks to an X-ray photoelectron spectroscopy capable of analyzing a chemical bonding state regarding an X-ray analysis device and ferroelectric substance polarization characteristic analysis method.;SOLUTION: An X-ray analysis device comprises: an X-ray source that irradiates a monochromatic X-ray of an energy higher than 5 keV; a photoelectron analyzer that detects a photoelectron generating from a sample including a ferroelectric substance due to the irradiation of the monochromatic X-ray; a sample stage that loads the sample and controls a taking-out angle of the photoelectron; a voltage application mechanism that applies a voltage to the sample; and an analysis unit that acquires an inner shell spectrum constituting the ferroelectric substance from the detected photoelectron, and derives a polarization characteristic of the ferroelectric substance from the acquired inner shell spectrum.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT