CONCENTRATION LEVELING DEVICE, FLUID PROCESSING SYSTEM AND CONCENTRATION LEVELING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a concentration leveling device capable of leveling efficiently the concentration of a material to be processed in a fluid, and reducing cost of a processing unit in a subsequent stage.;SOLUTION: A concentration leveling device includes a split point where a fluid is split, A passage and B passage split from the split point, a concentration leveling buffer provided in the A passage, and filled with an adsorbent for absorbing/desorbing a material to be processed contained in the fluid, a confluence of a fluid passing through the concentration leveling buffer and a fluid flowing through the B passage, and a fluid temperature control part for controlling a temperature of the fluid flowing into the concentration leveling buffer.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT