METHOD FOR OPERATION INSTABILITY DETECTION IN SURFACE WAVE PLASMA SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a method and a system for operation instability detection in a surface wave plasma source.SOLUTION: A method and a system for operation instability detection in a surface wave plasma source are provided. A system for plasma processing may include the surface wave plasma source configured to generate a plasma field. The system may includes an optical sensor configured to generate information for characterizing the optical energy recovered in a region near the surface wave plasma source. Furthermore, the system may include a sensor logical unit configured to detect an instability region near the surface wave plasma source in response to the information generated by the optical sensor.SELECTED DRAWING: Figure 1