METHOD FOR OPERATION INSTABILITY DETECTION IN A SURFACE WAVE PLASMA SOURCE

摘要

A method and a system for detecting operation instability in a surface wave plasma source are provided. According to an embodiment of the present invention, a system for plasma processing includes a surface wave plasma source for generating a plasma field. The system also includes an optical sensor for generating information characteristic of optical energy collected in a region adjacent to the surface wave plasma source. Additionally, the system includes a sensor logic unit for detecting an instability region adjacent to the surface wave plasma source in response to information generated by the optical sensor.