PLATE-LIKE BODY PROCESSING METHOD AND PLATE-LIKE BODY PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plate-like body processing method that can shorten the time until correction of a target locus is completed.;SOLUTION: A plate-like body processing method of, in accordance with a target locus of a rotary grinding wheel with respect to a table, performing a relative movement of the table and the rotary grinding wheel, and grinding the outer peripheral edge of the plate-like body held by the table with the rotary grinding wheel acquires a plurality of images captured by imaging different portions of the outer peripheral edge of the plate-like body held by the table prior to grinding by an imaging unit, detects the position of the outer peripheral edge prior to grinding in each image, and calculates a parallel movement amount and a rotational movement amount which are correction amounts of the target locus on the basis of a detection result.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT