PLATE-LIKE BODY PROCESSING METHOD AND PLATE-LIKE BODY PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a plate-like body processing method by which a dimension of a plate-like body after processing can be stabilized.;SOLUTION: According to this plate like-body processing method, cut processing, in which a table and a rotary grindstone are relatively moved according to a target locus of a rotation center of the rotary grindstone with respect to the table and an outer peripheral edge of a plate-like body held by the table is cut by an outer peripheral edge of the rotary grindstone, is repeated while replacing the plate-like body. Said cut processing has: processes S103, S109 in which imaging of outer peripheral edges of one plate-like body and another plate-like body is performed within pre-set plural imaging ranges; a process S111 in which a dimensional change amount between the outer peripheral edge of one plate-like body after cutting and the outer peripheral edge of another plate-like body after cutting and a positional deviation of each imaging range are calculated on the basis of a positional relationship between the outer peripheral edge of one plate-like body after cutting and the outer peripheral edge of another plate-like body after cutting within said imaging ranges; and a process S112 in which the target locus is corrected on the basis of the dimensional change amount.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT