MANUFACTURING METHOD OF RADIATION DETECTION DEVICE, RADIATION DETECTION DEVICE AND RADIATION DETECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a technology that suppresses image quality degradation in a radiation detection device using a scintillator.;SOLUTION: A manufacturing method of a radiation detection device comprising a scintillator having columnar crystals placed on a substrate and a protection film covering the scintillator is provided, and the scintillator includes an abnormal growth part which protrudes more than other parts in a surface of the scintillator. The manufacturing method comprises: a flattening step that flattens the scintillator by applying pressure at least the abnormal growth part of the scintillator through an adhesion prevention part using a flattening member; and a forming step that forms the protection film after the flattening step, and a material having smaller surface energy than the surface energy of the material used in the surface of the protection film is used in the surface of the adhesion prevention part.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT