PIEZOELECTRIC ACTUATOR, OPTICAL DEFLECTOR, OPTICAL SCANNER, IMAGE PROJECTION APPARATUS, AND MOVING BODY

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of continuing to operate on the whole even if a piezoelectric member short-circuits.;SOLUTION: A piezoelectric actuator 13 has: zigzag beam parts 130a, b formed by connecting a plurality of piezoelectric drive parts at a fold-back part 205; a piezoelectric part 202 arranged at the respective piezoelectric drive parts; an upper electrode 203 and a lower electrode 201 formed to hold the piezoelectric parts 202 therebetween; and a wiring part 151 connected to at least one of the upper electrode 203 and lower electrode 201. The wiring part 151 at least has a first pattern 151a and a second pattern 151b as wiring patterns which are independent of each other so as to apply voltages to two mutually adjacent piezoelectric parts of the piezoelectric drive parts, respectively, and the first pattern 151a and second pattern 151b comprise branch parts 155a, b branching off at halfway parts 158a, b, and electrode connection parts 156a, b branched by the branch parts 155a, b to be each connected to one of the upper electrode 203 and lower electrode 201.;SELECTED DRAWING: Figure 12;COPYRIGHT: (C)2018,JPO&INPIT