ANNULAR FILM FORMATION METHOD, ANNULAR FILM FORMATION TOOL, AND ANNULAR FILM FORMATION MASK

摘要

PROBLEM TO BE SOLVED: To form an annular thin film on a film formation object.;SOLUTION: Masks (21 to 24) having a magnetic material or a magnet at least partially are disposed on one face of film formation objects (11 to 14). At the same time, magnets or magnetic bodies (31 to 34) that act with the magnetic material or the magnet of the masks (21 to 24) are disposed in the vicinity of the other face of film formation objects (11 to 14) and the masks (21 to 24) are made to come in contact with the film formation objects (11 to 14). Under such a state, a film formation material is deposited on aside of a face where the masks (21 to 24) of the film formation objects (11 to 14) are provided.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT